基于虚拟仪器的微波芯片MPW测试系统设计
DOI:
CSTR:
作者:
作者单位:

南京国博电子股份有限公司

作者简介:

通讯作者:

中图分类号:

TN98

基金项目:


Design of Microwave Chip MPW Test System based on Virtual Instrument
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 图/表
  • |
  • 访问统计
  • |
  • 参考文献
  • |
  • 相似文献
  • |
  • 引证文献
  • |
  • 资源附件
  • |
  • 文章评论
    摘要:

    为解决微波芯片多项目测试功能复杂、测试效率低、测试稳定性差等问题,设计了一种基于虚拟仪器的多项目晶圆(MPW,multi-project wafer)测试系统;采用虚拟仪器作为软件工具编程语言,设计以多项目测试为核心的探针台动作控制、仪器测试控制、数据采集与分析处理等功能,以满足微波芯片MPW测试需求;经验证结果表明该测试系统可通过晶圆绘制软件工具制作Wafer Map下发至晶圆测试软件工具进行多项目位置识别,按照设计的测试流程控制仪器与探针台,可实现微波芯片的多项目晶圆测试任务;该测试系统可柔性化应用于各类型的MPW测试场景,相比常规晶圆测试系统无法高效完成多项目测试的局限性,可大幅度提升微波芯片的多项目晶圆测试效率,降低测试成本。

    Abstract:

    In order to solve the problems of complex test function, low test efficiency and poor test stability of microwave chip, a multi-project wafer(MPW)test system based on virtual instrument was designed. Using virtual instrument as the programming language of software tool, the functions of probe station motion control, instrument test control, data acquisition and analysis processing with multi-project test as the core are designed to meet the needs of microwave chip MPW test. The experimental results show that the test system can make Wafer Map by the wafer drawing software tool and send it to the wafer test software tool for multi-project location identification. According to the designed test process, the instrument and probe table can be controlled to realize the multi-project wafer test task of microwave chip. The test system can be flexibly applied to various types of MPW test scene. Compared with the limitation that the conventional wafer test system can not efficiently complete the multi-project test, the multi-project wafer test efficiency of microwave chips can be greatly improved and the test cost can be reduced.

    参考文献
    相似文献
    引证文献
引用本文

俞利国,虞书铭,张邓,陈 浩.基于虚拟仪器的微波芯片MPW测试系统设计计算机测量与控制[J].,2025,33(7):130-138.

复制
相关视频

分享
文章指标
  • 点击次数:
  • 下载次数:
  • HTML阅读次数:
  • 引用次数:
历史
  • 收稿日期:2025-04-10
  • 最后修改日期:2025-05-21
  • 录用日期:2025-05-23
  • 在线发布日期: 2025-07-16
  • 出版日期:
文章二维码