Abstract:Dew point temperature, as the most accurate method for humidity measurement, is widely used in the production and development of weapon equipment; quartz crystals, due to their high quality factor and highly sensitive mass-loading effect, are used in the development of new resonant precision dew point meters; aiming at the system error problem introduced by traditional quartz resonant dew point sensors due to their inability to directly measure their surface temperature, a quartz resonant dew point sensor integrated with a thermal resistor is proposed; through microelectromechanical systems technology, a platinum thermal resistor is integrated on the surface of the quartz crystal, realizing direct measurement of the quartz crystal's surface temperature, thereby eliminating the system error; the structural parameters of the sensor are optimized and designed using theoretical calculations and finite element analysis, and the performance of the designed quartz resonant dew point sensor is verified through experiments; the experimental results show that the measurement accuracy of the quartz resonant dew point sensor integrated with a thermal resistor can reach ±0.08℃ DP, and the repeatability is less than 0.11℃ DP, significantly improving the measurement accuracy of traditional quartz resonant dew point sensors.